Description

The core process, named EIL is based on the transfer of the electrode material to the surface of the workpiece. The main movements of the spindle with the EI of the installation are linear motions along the three X, Y and Z coordinates. When installing the rotary table on the table, an additional coordinate U is added.

Installation MEIEL-14M is equipped with a built-in generator of current doping pulses, allowing to provide various technological methods due to the introduction of additional energy release within the period of following the main impulses, which distinguishes it from the majority of competitors in the world.

The built-in dopant current pulse generator also allows:

- Create pedestals in pauses between impulses;

- Control the crystallization regimes of the liquid mass of the substrate by additional spark discharges with a prescribed law of energy release;

- Combine the acquisition of the layer with its smoothing (depending on the requirements for roughness).

Specification

1. Specification__RUS_ENG.docx