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Installation of manifestation of negative photoresist UPF-2
The installation is intended for the development of positive photoresist on the substrate by centrifuging. Installation can be used independently and as part of the line. The unit is manufactured in climatic version UHL 4.1 according to GOST 15150-69. The unit is powered from an AC mains with a voltage of 220V and a frequency of 50 Hz. The requirement for the quality of electrical energy according to GOST 13109-87. The installation provides operation when compressed air is supplied in accordance with GOST 17433 under pressure of 3 * 105 Pa, 3kgs / cm2.
Part number:
Supplier:
The Ruselectronics holding companyDescription
Technical details:
Length mm 850
Width mm 750
Height mm 1400
Weight not more than kg 200
The size of the substrates used (mm) 60x48, 48x30, 48x20, 30x24, 24x15.
Shaft speed rpm 0-3500
Speed reference speed rpm +/- 1
Accuracy of maintenance of rotational speed%. +/- 1
Number of developer feed channels 1
The number of channels of supply of isopropyl alcohol 1
Developer dosing range ml 1 ... 120.0
Accuracy of dosing ml +/- 0,2
Dosing range of isopropyl alcohol ml 100 ... 30.00
Accuracy of dosing isopropyl alcohol ml 10 ... 50.0
Installation is completed with a set of removable tables
Cycle time setting range, sec 1 ... 999
Maximum electrical power required by the installation, not more than kVA 1.0
Consumption of compressed air supplied to the installation, not more than m3 / h 14
The installation ensures continuous operation for hours 8
Length mm 850
Width mm 750
Height mm 1400
Weight not more than kg 200
The size of the substrates used (mm) 60x48, 48x30, 48x20, 30x24, 24x15.
Shaft speed rpm 0-3500
Speed reference speed rpm +/- 1
Accuracy of maintenance of rotational speed%. +/- 1
Number of developer feed channels 1
The number of channels of supply of isopropyl alcohol 1
Developer dosing range ml 1 ... 120.0
Accuracy of dosing ml +/- 0,2
Dosing range of isopropyl alcohol ml 100 ... 30.00
Accuracy of dosing isopropyl alcohol ml 10 ... 50.0
Installation is completed with a set of removable tables
Cycle time setting range, sec 1 ... 999
Maximum electrical power required by the installation, not more than kVA 1.0
Consumption of compressed air supplied to the installation, not more than m3 / h 14
The installation ensures continuous operation for hours 8