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Installation of applying a positive photoresist UNF-1
The installation is intended for applying a positive photoresist on a substrate by centrifuging. Installation can be used independently and as part of the line. The unit is manufactured in climatic version UHL 4.1 according to GOST 15150-69. The unit is powered from an AC mains with a voltage of 220V and a frequency of 50 Hz. The requirement for the quality of electrical energy according to GOST 13109-87. The installation provides operation when compressed air is supplied in accordance with GOST 17433 under pressure of 3 * 105 Pa, 3kgs / cm2.
Part number:
Supplier:
The Ruselectronics holding companyDescription
Technical details:
Length mm850
Width mm 750
Height mm 1400
Weight not more than kg 200
The size of the substrates used (mm) 60x48, 48x30, 48x20, 30x24, 24x15.
Shaft speed rpm 0-3500
Speed reference speed rpm +/- 1
Accuracy of maintenance of rotational speed%. +/- 1
The number of channels of the photoresist 1
Accuracy of dosing 0.2 ml +/-
Dosing range of photoresist ml 0.5 ... 10.0
Installation is completed with a set of removable tables.
Cycle time setting range, sec 1 ... 999
Maximum electrical power required by the installation, not more than kVA 1.0
Consumption of compressed air supplied to the installation, not more than m3 / h 14
The installation ensures continuous operation for hours 8
Length mm850
Width mm 750
Height mm 1400
Weight not more than kg 200
The size of the substrates used (mm) 60x48, 48x30, 48x20, 30x24, 24x15.
Shaft speed rpm 0-3500
Speed reference speed rpm +/- 1
Accuracy of maintenance of rotational speed%. +/- 1
The number of channels of the photoresist 1
Accuracy of dosing 0.2 ml +/-
Dosing range of photoresist ml 0.5 ... 10.0
Installation is completed with a set of removable tables.
Cycle time setting range, sec 1 ... 999
Maximum electrical power required by the installation, not more than kVA 1.0
Consumption of compressed air supplied to the installation, not more than m3 / h 14
The installation ensures continuous operation for hours 8